MEMS 振荡器
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MEMS Oscillators Spread Their Wings
Microelectromechanical system (MEMS) technology is leveraging established process advantages afforded by silicon process technology – low cost, precise operation, small size, among others – to replace older technology in numerous devices: pressure sensors, temperature sensors, accelerometers, gyroscopes, even gas detectors and chemical analyzers. You can even add precision clock generators to that expanding list.